Nanopositioner stage with 6 degree of freedom
Solutions for ultra-precise alignment
The PHI-SS-6DOF is a nanopositioner piezoelectric device by Phi Drive which combines 6 degrees of freedom.
The displacement/tilting system is composed of: UX, UY, UZ, ROTX, ROTY, ROTZ. Each PHI-SS stage is inspired by the “Micro” version of Phi Drive but the dimensions have been limited to create a device that can be positioned in very small spaces.
Main features:
- 6 degrees of freedom;
- Linear movement travel range: ± 1 mm;
- Tilting movement travel range: 0 +3 deg;
- Rotative (ROTZ) travel range: ± 5°;
- Finite step resolution up to 100 nm;
- Resolution in correction stage mode up to 0.7 nm;
- Stick& slip patented piezo solution;
- High precision;
- No backlash;
- No drift if driven in finite step mode;
- No lubricant needed;
- 40g payload;
- Open-loop and/or closed-loop control;
- Strokes customizable;
- Available gripper, on top, to hold fiber optic array
Nanopositioner Applications
- Fiber positioning and alignment;
- Optics and laser applications;
- Photonics and integrated optics;
- Nanotechnology and nano-manufacturing;
- Micromanipulation;
- Sample positioning;
- Scanning microscopy.
FAQs
Frequently asked questions
Phi Drives' nanopositioner division focuses on the design, engineering, and manufacturing of piezoelectric motor-driven positioners and integrated nanopositioning solutions for applications with the highest resolution, repeatability, and stability requirements. Phidrive's piezo flexure stages allow nanopositioning and scanning with nanometer precision in up to 6 axes, including tip, tilt and yaw motion. XYZ stages are customizable according to specific use.
The PHI-SS-6DOF designed by Phidrive combine sub-nanometer resolution and guiding precision with no blacklash. The PHI-SS-6DOF is particularly suitable for applications in semiconductors manufacturing, metrology, super-resolution microscopy, interferometry or inspection systems. The motorized stages are supported by a complete line of controllers for the various motors and piezoelectric actuators.
Flexure technology, piezoelectric actuators, and the absence of friction and lubricants absence of rolling guides ensure excellent and robust mechanics. Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. Positioning optimization is supported by piezoelectric motion controllers and is easily customized to meet customer needs. Phidrive has specific patents for high-precision mechanisms.
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