In last years Phidrive has dedicated its skills to the research and development of devices for the rapid and high stability alignment of components. All Phidrive nanopositioners incorporate a piezoelectric motor for nanometer-precise resolution and additionally use special, backlash-free, non-rolling guides.

areas of application

The PHI-SS-6DOF is particularly appropriate for:

• metrology
• semiconductors
• super-resolution microscopy,
• interferometry
•  inspection systems

The motorized stages are supported by a complete line of controllers for the various motors and piezoelectric actuators.

Your Advantages with PhiDrive as Partner:

• Motion control systems designed to improve the speed and accuracy of alignment processes
• Understand needs and offer tailor-made solutions for customers to obtain custom products
• Decades of experience in the development and implementation of motion control systems and alignment solutions