High Precision Rotary Positioner

The high precision in positioning is nowadays a requirement of fundamental importance in many industrial sectors: from semiconductor production, to microscopy, from biotechnology, to medical engineering and industrial automation. All these fields have one thing in common: they require positioning systems with high resolution and repeatability in the order of nanometers and / or nanoradians. In addition, requirements of short response times that only piezoelectric technology can guarantee.

Reaching nanometric and sub-nanometric shifts is not easy and is often limited by the presence of external disturbances. For this reason, the rotary tables of Phi Drive are equipped with specially developed electronics to limit the noise and therefore increase its robustness. All products of the COR-RS line incorporate piezoelectric technology and flexure-type mechanisms; only the combination of these technologies makes it possible to achieve high performance with the advantage of a high level of customization.

COR-RS Configurator

Select the desired option to obtain the resulting product code

Stage type Encoder Resolution High Vacuum Code