Rotary micro positioner

Semiconductors production, microscopy, biotechnology, biomedical engineering and industrial automation require positioning systems with high resolution and repeatability, often in the order of nanometers and/or nanoradians. In addition to that, low response times result only from using piezoelectric technology. The high positioning precision is then a fundamental requirement in almost every sector.

However, reaching nanometric and sub-nanometric displacements is not an easy task. This is why all Phi Drive’s products are equipped with ad hoc electronics, which is capable of minimizing the electronic noise.

Phi Drive’s products are equipped with piezoelectric technology and flexure mechanisms. High performances and high customization are the result of these technologies.

Configuratore COR-RS

Seleziona le opzioni desiderate per ottenere il corrispondente codice prodotto:

Tipo di stadio Encoder Risoluzione High Vacuum Codice COR-RS