COR-PS – Linear Nano-Positioning Piezo Stage


Phi Drive has developed a range of nanometric positioning piezo stages for the industrial, research and metrology market areas where small and very small displacements are necessary.

 

Achieving nanometric or sub-nanometric displacement is not easy, and this systems are often very sensitive to external noise. Stages from the COR-PS product range have been conceived to be robust to sources of noise thanks to:

 

  • A hybrid layout with high inertia in steel and ergal, giving stability to mechanical vibrations;
  • Electronics specially designed to minimize noise and increase robustness to external disturbances

 

All COR-PS stages are based on piezoelectric actuation and displacement amplifying flexure mechanisms.

 

Specific care is put by Phi Drive in determining the linearity error, it can be refined on customers’ request by choosing the calibration process.

 

During calibration, COR-PS displacement is compared with a reference measurement instrument, such that a geometric correction matrix is defined over the entire travel of the stage. The more points are used for calibration, the more the linearity error will be reduced.

Main technical characteristics:

  • Nanometric resolution: 15 down to 0.18 nm
  • 110 µm up to 160 µm travel range
  • Very high maximum load: 5 kg
  • Linearity error: 0.027% down to 0.0022%
  • Dynamic range: 0-100 Hz up to 0-700 Hz
  • High vacuum option

COR-PS: piezo linear stage for nanometric positioning

CSP – Custom Solution Positioning

Phi Drive supports the customer on the choice of the best solution, with the possibility of customizing any specification:

  • travel range;
  • multi-axis solutions;
  • resolution;
  • encumbrance;
  • flanges to fix the stage;
  • flanges for mounting the load.

Overview

  • Customizable travel range: 10 to 300 micron or more
  • High precision
  • No backlash
  • No friction or lubricant
  • Integrated closed-loop sensor
  • Open loop option available
  • High load capability
  • High dynamic range
  • Sub-nanometric resolution

Encoding COR-PS: choose the configuration which better suits your needs

Choose between the following options to create your requested code:

 

COR-PS.XY.N

CONFIGURATION TRAVEL ACCURACY RESOLUTION REPEATIBILITY BANDWIDTH AFFORDABILITY
 COR-PS.SA.1  +  +  +++  +  ++  +++
 COR-PS.SA.2  +++  +  +++  +  +++  +++
 COR-PS.SC.1  +  ++  +  ++  ++  ++
 COR-PS.SC.2  +++  ++  +  ++  +++  ++
 COR-PS.HC.1  +  +++  ++  +++  +  +
 COR-PS.HC.2  ++  +++  ++  +++  +  +
 Option Description
S Standard Resolution
H High Resolution
 Option Description Benefits
A No-feedback open-loop control
  • Better resolution
  • More compact design
  • Better dynamic performances
C Integrated sensor closed-loop control

and control electronics

  • Better accuracy
  • Better repeatibility

COR-PS positioners have been designed to operate under high vacuum conditions, in line with all the latest generation of Phi Drive products.

Specifications

Models COR-PS.SC.1 COR-PS.SC.2 COR-PS.HC.1 COR-PS.HC.2  
Mechanical and Positioning Specifications
Axis of Motion X X X X
Travel Open-loop 110 160 120 140 µm
Closed-loop 110 160 120 130 µm
Resolution Open-loop 8 0.23 0.18 0.2 nm
Closed-loop 15 15 1.5 1.5 nm
Linearity Error (Closed-loop) 0.027 0.019 0.0025 0.0022 %
Repeatability (Closed-loop) 15 15 1.5 1.5 nm
Pitch ±3 ±3 ±3 ±3 µrad
Yaw ±10 ±10 ±10 ±10 µrad
Straightness/Flatness 1 1 1 1 µm
Stiffness (direction of motion) 1 1 1 1 N/um
Maximum Load 5 5 5 5 kg
Push/Pull Load 8 10 8 10 N
Resonant Frequency Unloaded 400 700 100 100 Hz
Load 0.5 kg 300 380 100 100 Hz
Load 1 kg 200 370 100 100 Hz
Settle Time Unloaded 0.1 0.1 0.1 0.1 ms
Load 0.5 kg 0.2 0.2 0.2 0.2 ms
Load 1 kg 0.4 0.4 0.4 0.4 ms
Materials Body Steel Steel Steel Steel
Actuator PZT Ceramic PZT Ceramic PZT Ceramic PZT Ceramic
Case Aluminum Aluminum Aluminum Aluminum
Stage Dimensions Footprint 100 x 110 100 x 110 100 x 110 100 x 110 mm
Height 29 29 46 46 mm
Stage Mass <1.2 <1.2 1.2 1.2 kg
Moving plate dimensions 70 x 70 x 6 70 x 70 x 6 70 x 70 x 6 70 x 70 x 6 mm
Moving plate mass 0.120 0.120 0.120 0.120 kg
Operating Temperature Range -10 to +60 -10 to +60 -10 to +60 -10 to +60 °C
Storage Temperature Range +10 to +40 +10 to +40 +10 to +40 +10 to +40 °C
Input Power 10 10 10 10 W
 
Drive & Electronic Specifications
Drive Type Piezoelectric stack actuator
Capacitance of Piezostack 2.74 5.86 3.07 5.86 μF
Input Voltage Range -20 to +150 -20 to +150 -20 to +150 -20 to +150 V
Feedback Sensor (closed-loop) Sensor Type Eddy-current Eddy-current Eddy-current Eddy-current
Connector BNC BNC BNC BNC
Power Supply Specification 230V, 50Hz
Models COR-PS.SA.1 COR-PS.SA.2
Mechanical and Positioning Specifications
Axis of Motion X X
Travel 110 160 µm
Resolution 8 0.23 nm
Pitch ±3 ±3 µrad
Yaw ±10 ±10 µrad
Straightness/Flatness 1 1 µm
Stiffness (direction of motion) 1 1 N/um
Maximum Load 5 5 kg
Push/Pull Load 8 10 N
Resonant Frequency Unloaded 400 700 Hz
Load 0.5 kg 300 380 Hz
Load 1 kg 200 370 Hz
Materials Body Steel Steel
Actuator PZT Ceramic PZT Ceramic
Case Aluminum Aluminum
Stage Dimensions Footprint 100 x 110 100 x 110 mm
Height 23 23 mm
Stage Mass <1.2 <1.2 kg
Moving plate dimensions 70 x 70 x 6 70 x 70 x 6 mm
Moving plate mass 0.120 0.120 kg
Operating Temperature Range -10 to +60 -10 to +60 °C
Storage Temperature Range +10 to +40 +10 to +40 °C
Input Power 10 10 W
 
Drive & Electronic Specifications
Drive Type Piezoelectric stack actuator
Capacitance of Piezostack 2.74 5.86 uF
Input Voltage Range -20 to +150 -20 to +150 V

Dimensions

 

 

 

Code A B C D E F G H I J K L M N O P Q R S T U V W
COR-PS.SA.1 100 100 17 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29
COR-PS.SA.2 100 100 17 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29
COR-PS.SC.1 100 100 23 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29
COR-PS.SC.2 100 100 23 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29
COR-PS.HC.1 100 110 40 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29
COR-PS.HC.1 100 110 40 6 70 70 80 80 4.1 8.2 8.5 32 40 60 32 40 60 M3 5.5 10 15 13.5 29

*All dimensions are given in mm.